IJS Oprema

ID: 9773

Name: Atomic force microscope and lithography system with acompanying equipment

Type: microscopy

Owner: Institut "Jožef Stefan"

Dept.: F7

Year of acq.: 2004

KET field: Nanotechnology
Advanced materials

Price for usage (EUR/h): 47.95

Responsible person: Dragan Mihailović

Responsible person email: Dragan.Mihailovic@ijs.si

Possibilities to rent: Research is performed by researcher of JSI.

Purchase value (EUR): 150337.82

Description/Usage: Surface topography imaging and nanostructure manipulation. Electron litography for drawing circuits.

JSI Inventory number: