Publication Number:	SI23611A
Application Date:	20. 1. 2011
Assignee/Applicant:	Jožef Stefan Institute [SI]
Inventor:	Miran Mozetič, Alenka Vesel, Rok Zaplotnik
Title:	Metoda in naprava za vzbujanje visokofrekvenčne plinske plazme [SL], Device for High-Frequency Excitation of Gas Plasma [EN]
Description:	The subject invention is a device for high-frequency excitation of gas plasma, which is to optimize the transmission of electromagnetic power radiofrequency generator (8) in a gas plasma. Power transmission is optimized by using two or more parallel overlapping excitation and indented coils (11, 12), which are connected in series within the generator (8), high cable (9), the conciliation Art (10), the excitation coil (11, 12). Measurement of voltage at the terminal of the excitation coil (11, 12) prove that the same power transfer to a lower voltage dual exciter coil (11, 12), which is composed of parallel overlapping excitation coils (11, 12) as normal exciter coil (11). At the same voltage coil terminals (11, 12), the plasma also much more intense, if it is generated in two parallel overlapping excitation coil (11, 12).
Drawings:
Category:	Physical Sciences
Technology application codes:	Physical and exact sciences, Other industrial technologies
Market application codes:	Industrial products, Other
www:	https://worldwide.espacenet.com/patent/search/family/045922789/publication/SI23611A?q=si23611
Patent offices:	UIL RS

 

Extended patent application

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Publication Number:	DE112012000015B4
Application Date:	19. 1. 2012
Assignee/Applicant:	Jožef Stefan Institute [SI]
Inventor:	Miran Mozetič, Alenka Vesel, Rok Zaplotnik
Title:	Vorrichtung für die Anregung eines Hochfrequenz-Gasplasmas
www:	https://worldwide.espacenet.com/patent/search/family/045922789/publication/DE112012000015B4?q=pn%3DDE112012000015B4

 

Extended patent application

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Publication Number:	WO2012099548A1
Application Date:	19. 1. 2012
Assignee/Applicant:	Jožef Stefan Institute [SI], Miran Mozetič [SI], Alenka Vesel [SI], Rok Zaplotnik [SI]
Inventor:	Miran Mozetič, Alenka Vesel, Rok Zaplotnik
Title:	Device for High-Frequency Gas Plasma Excitation
www:	https://worldwide.espacenet.com/patent/search/family/045922789/publication/WO2012099548A1?q=pn%3DWO2012099548A1