Apparatus, System and Method for Sustaining Inductively Coupled Plasma
| Publication Number: |
EP3965139C0 |
| Application Date: |
3. 9. 2020 |
| Assignee/Applicant: |
Jožef Stefan Institute [SI] |
| Inventor: |
Zaplotnik Rok; Primc Gregor; Vesel Alenka; Mozetic Miran |
| Title: |
Apparatus, System and Method for Sustaining Inductively Coupled Plasma |
| Description: |
An apparatus and method for igniting and sustaining inductively coupled gaseous plasma in the H-mode with the induction coil placed inside the metallic vacuum chamber is disclosed. The coil is mounted into a double-cup shape housing, preferably constructed from dielectric tubes of co-cylindrical geometry, sealed vacuum-tightly at the side stretching into the metallic vacuum chamber. The outer cylinder of the double-cup shape housing separates vacuum in the metallic chamber from the atmosphere between the two dielectric cylindrical tubes, and the inner cylinder separates inductively coupled plasma in the H-mode inside the vacuum chamber from the atmosphere between the two dielectric cylindrical tubes. The atmosphere between the two cylindrical tubes is typically air at the pressure of about 1 bar. |
| Drawings: |
 |
| Category: |
Physical Sciences |
| Technology application codes: |
Other industrial technologies, Physical and exact sciences, Measurements and standards |
| Market application codes: |
Industrial products, Other |
| www: |
https://worldwide.espacenet.com/patent/search/family/072380897/publication/EP3965139C0?q=pn%3DEP3965139A1 |
| Patent offices: |
WIPO |
