IJS Oprema

ID: 9774

Name: Elipsometer

Type: physical and chemical analysis

Owner: Center odličnosti nanoznanosti in nanotehnologije (CO NIN)

Dept.: F7

Year of acq.: 2011

KET field: Nanotechnology
Advanced materials

Price for usage (EUR/h): 60

Responsible person: Dragan Mihailović

Responsible person email: dragan.mihailovic@ijs.si

Possibilities to rent: Research is performed by researcher of JSI.

Purchase value (EUR): 225096

Description/Usage: Optical ellipsometry is a non-destructive technique for investigation of surfaces, interfaces and thin films. It probes modifications of the polarization state of optical beam reflected from the sample. Imaging ellipsometer uses microscopic objectives to reduce the size of investigated surface region to the micrometer range. Our ellipsometer uses objectives with extra-long working distance, which provides measurements on surfaces of macroscopic objects. The magnified image of the sample is visualised in reflected light, which propagates through a set of selected polarization sensitive optical elements. The resulting “polarization filtered” image is detected by CCD camera with variable shutter timings and gain control. The system provides ellipsometric analysis with the lateral resolution of 1 μm. This allows the user to perform measurements on microstructured samples. Several regions of interest can be analysed at the same time.

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