IJS Oprema

ID: 9829

Name: Laboratory sputtering equipment

Type: equipment for surface engineering

Owner: Institut "Jožef Stefan"

Dept.: K5

Year of acq.: 2002

KET field: Advanced materials
Micro- and Nano-electronics

Price for usage (EUR/h): 43.54

Responsible person: Barbara Malič

Responsible person email: Barbara.Malic@ijs.si

Possibilities to rent: Research is performed by researcher of JSI.

Purchase value (EUR): 112852.05

Description/Usage: Sputtering of metal electrodes on different materials. Option sputtering up to three different metal layers in a single cycle.

JSI Inventory number: