Name: Laboratory sputtering equipment
Type: equipment for surface engineering
Owner: Institut "Jožef Stefan"
Year of acq.: 2002
KET field: Advanced materials
Micro- and Nano-electronics
Price for usage (EUR/h): 43.54
Responsible person: Barbara Malič
Responsible person email: Barbara.Malic@ijs.si
Possibilities to rent: Research is performed by researcher of JSI.
Purchase value (EUR): 112852.05
Description/Usage: Sputtering of metal electrodes on different materials. Option sputtering up to three different metal layers in a single cycle.
JSI Inventory number: