IJS Oprema

ID: 9714

Name: Magnetron sources and power supply for deposition of low temperature hard coatings

Type: equipment for surface engineering

Owner: Institut "Jožef Stefan"

Dept.: F3

Year of acq.: 2007

KET field: Advanced materials

Price for usage (EUR/h): 36.43

Responsible person: Peter Panjan

Responsible person email: Peter.Panjan@ijs.si

Possibilities to rent: Research is performed by researcher of JSI.

Purchase value (EUR): 52450

Description/Usage: Deposition of low temperature hard coatings by pulsed magnetron sputtering at temperature bellow 200 °C.

JSI Inventory number: