Name: Magnetron sources and power supply for deposition of low temperature hard coatings
Type: equipment for surface engineering
Owner: Institut "Jožef Stefan"
Year of acq.: 2007
KET field: Advanced materials
Price for usage (EUR/h): 36.43
Responsible person: Peter Panjan
Responsible person email: Peter.Panjan@ijs.si
Possibilities to rent: Research is performed by researcher of JSI.
Purchase value (EUR): 52450
Description/Usage: Deposition of low temperature hard coatings by pulsed magnetron sputtering at temperature bellow 200 °C.
JSI Inventory number: