Name: ProtoLaser LDI
Owner: Center odličnosti nanoznanosti in nanotehnologije (CO NIN)
Year of acq.: 2011
KET field: Nanotechnology
Price for usage (EUR/h): 60
Responsible person: Damjan Svetin
Responsible person email: Damjan.Svetin@ijs.si
Possibilities to rent: Research is performed by researcher of JSI.
Purchase value (EUR): 192203
Description/Usage: The ProtoLaser LDI is an universal, high-resolution, table top laser direct imaging (LDI) system for prototyping on resist-covered substrates. A transferred image has even better defined edges compared to conventional lithography. With a working area of up to 100 x 100 mm and structures down to 1 μm it is an ideal tool for microfluidic designs.
Using 100 kHz beam positioning by acousto-optic deflectors, extremely fast writing is possible. Illumination of a typical microfluidic circuit only takes a few minutes. Automated measurements compensate for unevenness of the substrate and applied resists.
JSI Inventory number: