IJS Oprema

ID: 9785

Name: ProtoLaser LDI

Type: lasers

Owner: Center odličnosti nanoznanosti in nanotehnologije (CO NIN)

Dept.: F7

Year of acq.: 2011

KET field: Nanotechnology
Advanced materials

Price for usage (EUR/h): 60

Responsible person: Damjan Svetin

Responsible person email: Damjan.Svetin@ijs.si

Possibilities to rent: Research is performed by researcher of JSI.

Purchase value (EUR): 192203

Description/Usage: The ProtoLaser LDI is an universal, high-resolution, table top laser direct imaging (LDI) system for prototyping on resist-covered substrates. A transferred image has even better defined edges compared to conventional lithography. With a working area of up to 100 x 100 mm and structures down to 1 μm it is an ideal tool for microfluidic designs. Using 100 kHz beam positioning by acousto-optic deflectors, extremely fast writing is possible. Illumination of a typical microfluidic circuit only takes a few minutes. Automated measurements compensate for unevenness of the substrate and applied resists.

JSI Inventory number: