Name: System for substrate cleaning
Type: equipment for surface engineering
Owner: Institut "Jožef Stefan"
Year of acq.: 2007
KET field: Nanotechnology
Price for usage (EUR/h): 43.79
Responsible person: Igor Muševič
Responsible person email: Igor.Musevic@ijs.si
Possibilities to rent: Research is performed by researcher of JSI.
Purchase value (EUR): 115000
Description/Usage: The equipment provides for preparation of ultra-clean surfaces for deposition of thin films of soft and solid matter, in particular liquid crystals.
JSI Inventory number: