Device for High-Frequency Excitation of Gas Plasma
| Publication Number: | SI23611A |
| Application Date: | 20. 1. 2011 |
| Assignee/Applicant: | Jožef Stefan Institute [SI] |
| Inventor: | Miran Mozetič, Alenka Vesel, Rok Zaplotnik |
| Title: | Metoda in naprava za vzbujanje visokofrekvenčne plinske plazme [SL], Device for High-Frequency Excitation of Gas Plasma [EN] |
| Description: | The subject invention is a device for high-frequency excitation of gas plasma, which is to optimize the transmission of electromagnetic power radiofrequency generator (8) in a gas plasma. Power transmission is optimized by using two or more parallel overlapping excitation and indented coils (11, 12), which are connected in series within the generator (8), high cable (9), the conciliation Art (10), the excitation coil (11, 12). Measurement of voltage at the terminal of the excitation coil (11, 12) prove that the same power transfer to a lower voltage dual exciter coil (11, 12), which is composed of parallel overlapping excitation coils (11, 12) as normal exciter coil (11). At the same voltage coil terminals (11, 12), the plasma also much more intense, if it is generated in two parallel overlapping excitation coil (11, 12). |
| Drawings: |  |
| Category: | Physical Sciences |
| Technology application codes: | Physical and exact sciences, Other industrial technologies |
| Market application codes: | Industrial products, Other |
| www: | https://worldwide.espacenet.com/patent/search/family/045922789/publication/SI23611A?q=si23611 |
| Patent offices: | UIL RS |
Extended patent application
| Publication Number: | DE112012000015B4 |
| Application Date: | 19. 1. 2012 |
| Assignee/Applicant: | Jožef Stefan Institute [SI] |
| Inventor: | Miran Mozetič, Alenka Vesel, Rok Zaplotnik |
| Title: | Vorrichtung für die Anregung eines Hochfrequenz-Gasplasmas |
| www: | https://worldwide.espacenet.com/patent/search/family/045922789/publication/DE112012000015B4?q=pn%3DDE112012000015B4 |
Extended patent application
| Publication Number: | WO2012099548A1 |
| Application Date: | 19. 1. 2012 |
| Assignee/Applicant: | Jožef Stefan Institute [SI], Miran Mozetič [SI], Alenka Vesel [SI], Rok Zaplotnik [SI] |
| Inventor: | Miran Mozetič, Alenka Vesel, Rok Zaplotnik |
| Title: | Device for High-Frequency Gas Plasma Excitation |
| www: | https://worldwide.espacenet.com/patent/search/family/045922789/publication/WO2012099548A1?q=pn%3DWO2012099548A1 |